INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 95)

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IQS-233 Operating Manual
Auto  Man , Man  Auto. . . . Click Auto  Man , which changes to Man  Auto , to
activate Manual mode and display parameters used
for manually controlling a deposition without PID
loop control.
Figure 2-57 Manual control parameters
Zero All . . . . . . . . . . . . . . . . Zeroes the Thickness readouts of all sensors.
Logging Off
Logging On . . . . . . . . . . . . Click Logging Off, which changes to Logging On, to
activate data logging. Click Logging On, which
changes to Logging Off, to make data logging
unavailable. Data logging may be activated with
Start or Stop displayed; however, data is not
collected when Start is displayed.