INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 53)

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IQS-233 Operating Manual
Accuracy Based . . . . . . . . . Used in conjunction with the Time Based parameter.
If the Rate does not exceed the % value when the
Time Based Sample value elapses, the shutter will
be closed for the Time Based Hold time, with Output
Power held at a constant level during that time;
otherwise, the shutter will remain open until the rate
is equal to or less than the % value. The % value is
a ± percentage of the desired deposition rate (± sign
is not entered before the value).
% . . . . . . . . . . . . . . . . . . . . . 00.0 to 100.00 %
Time Based . . . . . . . . . . . . . When deposition starts, the sensor shutter will be
opened for the Sample (sec) time, and then the
shutter will be closed for the Hold (sec) time, with
source power held at a constant level during that
time.
Sample (sec) . . . . . . . . . . . . 00.0 to 100.00 s
Hold (sec) . . . . . . . . . . . . . . 00.0 to 100.00 s