INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 116)

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IQS-233 Operating Manual
6 Determine the new density value with equation [1] :
[1]
where:
D
i
= Initial density setting
T
x
= Thickness reading in the IQS-233 Codeposition software window.
T
m
= Measured thickness
7 Round off density to the nearest 0.01 g/cm 3 .
8 A quick check of the calculated density may be made by programming
IQS-233 Codeposition software with the new density value and observing that
the displayed thickness is equal to the measured thickness, provided that the
Thickness readout has not been zeroed between the test deposition and
entering the calculated density.
NOTE: Due to variations in source distribution and other system factors, it is
recommended that a minimum of three separate evaporations be made to
obtain an average value for density.
NOTE: Slight adjustment of density may be necessary in order to
achieve T
x
= T
m
.
4.3 Determining Tooling
1 Place a test substrate in the system's substrate holder.
2 Make a short deposition and record the Thickness reading displayed in the
IQS-233 Codeposition software window when finished depositing.
3 Remove the test substrate and measure the film thickness with a multiple beam
interferometer or a stylus-type profilometer.
4 Calculate Tooling from the relationship shown in equation [2] :
[2]
where:
T
m
= Actual thickness at substrate holder
T
x
= Thickness reading in the IQS-233 Codeposition software window
TF
i
= Initial Tooling factor
Density g cm
3
   D
i
T
x
T
m
-------
 
 
 
=
Tooling (%) TF
i
T
m
T
x
-------
 
 
 
=