INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 90)

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IQS-233 Operating Manual
Sensor . . . . . . . . . . . . . . . . . Sensor 1 to 6 (IQM-233)
Sensor 1 to 8 (SQM-242)
The Sensor number corresponds to the Sensor
connections on the IQM-233 or SQM-242 card(s).
Refer to the IQM-233 or SQM-242 operating manual
for information about the Sensor connections.
NOTE: Sensor 1 to Sensor 3 are displayed if one
IQM-233 card is installed. Sensor 1 to
Sensor 4 are displayed if one SQM-242 card
is installed.
Rate Å/s, Thickness kÅ . . . Rate and Thickness are displayed only for Sensors
that are mapped to an Output used by the active
Layer. Outputs are mapped to Sensors in the
Sensors tab on the System Setup window (refer to
Figure 2-38 on page 2-47 ).
Frequency (MHz), Life (%) . . Displayed for all Physical Sensors assigned to a
Sensor name in the Sensors tab on the System
Setup window.
Control . . . . . . . . . . . . . . . . The control method used is displayed for all Physical
Sensors assigned to a Sensor name. The control
method is selected in the Sensors tab on the System
Setup window (refer to
Figure 2-38 on page 2-47 )
 (Output name): Sensor is mapped to the named
Output and is used for PID Rate and Thickness
End Point control.
 None: Sensor is not mapped to an Output.
 P: Sensor is the primary sensor channel of a dual
sensor
 S: Sensor is the secondary sensor channel of a
dual sensor.
 (Output name) (M): Sensor is used to monitor the
deposition with no PID Rate control.
 (Output name) (R): Sensor is used for PID Rate
control.
 (Output name) (T): Sensor is used for Thickness
End Point control.