INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 59)

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IQS-233 Operating Manual
Crystal Fail pane
A Crystal Fail error occurs if the crystal frequency of any Sensor used by the Film
is invalid for a specified number of measurements.
Enabled . . . . . . . . . . . . . . . Select the check box to activate the Crystal Fail
command.
Counts . . . . . . . . . . . . . . . . . 0 to 99
The quantity of invalid crystal frequency measurements. If this value is exceeded
the On Error action is initiated and the message Xtal Fail: Sensor x Freq is
displayed. An invalid frequency measurement is defined as no frequency, or a
frequency above the Max. Freq value or below the Min. Freq value in the Card tab
of the System Setup window.
CAUTION
If Ignore is selected as the On Error action and a Crystal
Fail occurs, Output Power can increase to maximum.
Selecting the Crystal Fail Enabled check box in
conjunction with selecting Stop Layer or Timed Power as
the On Error action is recommended.
CAUTION
When using a dual sensor, the Crystal Fail Enabled check
box must be selected for the Dual sensor shutter to open
if a Crystal Fail error occurs.