INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual
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IQS-233 Operating Manual
Thickness kÅ . . . . . . . . . . . Calculated thickness of material deposited on the
substrate. If more than one sensor is mapped to the
Output used by the current Layer, the displayed
thickness is an average of the thicknesses for those
individual sensors.
Thickness is affected by:
Density and Z-Ratio values in the Materials
window (refer to
)
Tooling value(s) in the Source/Sensor tab of the
Film Edit window (refer to
).
Power (%) . . . . . . . . . . . . . . Percentage of source output voltage relative to the
Full Scale (V) voltage setting for the corresponding
output channel.
Sensor/Output Pairing . . . . Displays the active sensor(s) monitoring the current
Layer and the corresponding output(s) selected in
the Layer tab of the Process window (refer to
Disable: Selecting Disable will stop the selected
sensor from taking readings and will display the
Thickness measured before Disable was
selected. Rate and Power will be displayed as
zero.
NOTE: If Disable is selected, it cannot be cleared
while a Process is running to enable that
sensor.
Graph . . . . . . . . . . . . . . . . . The graph displayed in the IQS-233 Codeposition
window is selected by clicking View on the menu bar
and selecting a graph from the list.
Rate Graph: Refer to
.
.
Power Graph: Refer to
.
Sensors Graph: Refer to
.
Automatic: Refer to
.