INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 120)

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IQS-233 Operating Manual
Figure 4-2 Determining the D value
4.5.1 Identifying a Fast or Slow Source
Classifying a source as being fast or slow is based on the time it takes for the rate
to change from a change in power (delay). It is straight forward to measure the
delay. Using manual power, establish a rate and allow it to become steady.
Increase the source power a few percent (~5% if possible). Allow the source to
again stabilize. If the delay time is greater than 1 second, the source is
characterized as slow. All other sources are considered fast. In general, electron
beam (e-beam) sources (unless a hearth liner is used), some very small filament
sources, and sputtering sources are considered fast sources. Thermal evaporation
sources are typically considered slow.
Dead Time
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RATE INCREASE
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POWER INCREASE
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Control DT