INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual

Page 42

Advertising
background image

2 - 22

IP

N 07

4-

58

5-

P1

A

IQS-233 Operating Manual

Film . . . . . . . . . . . . . . . . . . . The Film name selected in the Layer tab.

Setpoint . . . . . . . . . . . . . . . The Setpoint value selected in the Layer tab.

Final Thickness . . . . . . . . . The Final Thickness value selected in the Layer tab.

Time Endpoint . . . . . . . . . . The Time Endpoint value selected in the Layer tab.

Cut Layer . . . . . . . . . . . . . . Deletes the selected Layer from the Layer

information pane and moves that Layer to the
Clipboard.

Copy Layer . . . . . . . . . . . . . Copies the selected Layer to the Clipboard.

Paste Layer . . . . . . . . . . . . Inserts a Layer from the Clipboard directly below the

selected Layer. The Layer number increments for
each new Layer. Any Layers below the selected
Layer are shifted downward and their Layer numbers
are incremented accordingly. Click Paste repeatedly
to insert multiple Layers. The parameters for the new
Layer(s) in the Layer and Rate Ramps tabs can then
be changed as needed.

Paste CoDep . . . . . . . . . . . Pastes a Layer from the Clipboard directly below a

selected Layer. The selected Layer and pasted
Layer will become Codeposition Layers with the
same Layer number. Any Layers below the pasted
Layer will be shifted downward and their Layer
numbers incremented accordingly.

To create Codeposition Layers

1

Click an existing Layer and click Copy Layer.

2

Change the Output in the Layer tab (see

Figure 2-22

) of the existing layer.

3

Click Paste CoDep to paste the cut Layer directly below the selected Layer.
The Codeposition Layers will have the same Layer number.

NOTE: Each Codeposition Layer must use a different Output.

Advertising