INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual

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IQS-233 Operating Manual

Complete Signal . . . . . . . . If an indexer provides an in-position signal used to

indicate when it is in the selected position, select the
Complete Signal check box corresponding to the
Source, Substrate, or User Indexer. An external
means for detecting the in-position signal must be
provided (IQS-233 Codeposition software does not
have an Input Event that can be used with a PLC for
detecting the in-position signal). The Source Indexer
Done command must be sent to the
IQS-233 Codeposition software when the in-position
signal is true. If this command is not received before
the Timeout (sec) value elapses, the Layer will stop.

Timeout (sec) . . . . . . . . . . . 0 to 3000 s

The command of this parameter depends on the
status of the Complete Signal check box:

If the Complete Signal check box is selected, the
Layer will start if the Source Indexer Done
command is received by the software before the
Timeout (sec) time period elapses.

If the Complete Signal check box is clear, the
Layer will start when the Timeout (sec) time
period elapses.

Test Indexer. . . . . . . . . . . . . Source 1 to 6, Substrate, User 1 to 2

An indexer can be tested without starting a Process
by selecting the name of the indexer, selecting the
Index number, and clicking Move.

Index . . . . . . . . . . . . . . . . . . 0 to 15

Select the indexer position to move to at the start of
the Layer to access the pocket material for that layer.

Move . . . . . . . . . . . . . . . . . . Moves the indexer to the selected Index position.

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