INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 18)

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IQS-233 Operating Manual
1.3.5 System Parameters
Outputs. . . . . . . . . . . . . . . . . IQM-233: 1 to 6
SQM-242: 1 to 4
Full Scale Out. . . . . . . . . . . . -10.0 to 10.0 V (dc)
Sensors . . . . . . . . . . . . . . . . IQM-233: 1 to 6 (1 to 3 Dual)
SQM-242: 1 to 8 (1 to 4 Dual)
Control . . . . . . . . . . . . . . . . . Rate, Thickness
Relays (PLC required) . . . . . 16
Relay Events . . . . . . . . . . . . Source Shutter (1 to 6), Source Active (1 to 6),
Sensor Shutter (1 to 8), Process Stopped, Process
Running, Layer Stopped, Layer Running, Deposit
Phase, Pre-Cond Phase, Soak Hold Phase, Process
Active, Manual Mode, Max Power, Time Setpoint,
Thickness Setpoint, Final Thickness, All Crystals
Good, All Crystals Fail
Inputs (PLC required) . . . . . . 12
Input Events . . . . . . . . . . . . . Start Process, Abort Process, Start Layer, Stop
Layer, Next Layer, Force Final Thickness, Zero
Thickness, Zero Time (NA), Soak 2 Hold, Soak 2
Release
Card Type. . . . . . . . . . . . . . . IQM-233, SQM-242
Period. . . . . . . . . . . . . . . . . . 0.10, 0.25, 0.50, 1.00, 2.00 s
Maximum Frequency . . . . . . 4.002000 to 6.100000 MHz
Initial Frequency. . . . . . . . . . 4.001000 to 6.099000 MHz
Minimum Frequency. . . . . . . 4.000000 to 6.098000 MHz
Computer Interface . . . . . . . RS-232, Ethernet, Windows Communication
Foundation
RS-232 Baud . . . . . . . . . . . . 4800, 9600, 19200, 38400, 57600, 115200
Filter Readings . . . . . . . . . . . 1, 2, 3, 4, 5, 6, 7, 8, 9, 10
Last Output Displayed . . . . . 1 to 6
Units . . . . . . . . . . . . . . . . . . . Thickness, Mass
Graph X Axis Width . . . . . . . 0 to 100
Graph Y Axis Height. . . . . . . 0 to 10000