4 creating a process, 5 configuring the system – INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual
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IQS-233 Operating Manual
2.4.4 Creating a Process
1
Click Edit >> Process (refer to
2
Click New to create and name a new process (refer to
3
On the the Layer tab (refer to
section 2.3.3.5.4 on page 2-23
), select a Film
from the Film list, an Output from the Output list, an Input from the Input list,
and a Start Mode from the Start Mode list, and then enter process parameters
for Setpoint, Final Thickness, Thickness End Point, and Time End Point. If
using indexers, select a pocket number that corresponds to the layer from each
list on the Indexers pane.
NOTE: Click on the Layer Information pane (refer to
) to update changes for the layer.
4
If the process requires rate ramps, click the Rate Ramps tab (refer to
section 2.3.3.5.5 on page 2-26
) and enter parameters for Start Thickness,
Ramp Time, and Setpoint. Click Insert Ramp. Click OK to save the changes.
NOTE: Click on the Layer Information pane (refer to
) to update changes for the layer.
5
With Layer 1 selected, click Copy Layer >> Paste Layer to add an additional
layer into the process. Edit the parameters for the additional layer.
6
To create a codeposition layer, select Layer 2, click Cut Layer >> Paste
CoDep.
2.4.5 Configuring the System
1
Click Edit >> System and select the Outputs tab (refer to
2
Enter the Full Scale Output Voltages for each physical output connection on
the IQM-233 or SQM-242 card. Test each output prior to connecting a physical
output.
NOTE: Refer to the IQM-233 or SQM-242 operating manual for information
about the physical source output connection.
3
Click OK to save changes.
4
Click Edit >> System and select the Sensors tab (refer to
5
Select the physical sensor number for each named sensor and select a monitor
output.
6
Select Dual for each sensor in a dual sensor configuration connected to the
IQM-233 or SQM-242 card.