3 iqs-233 codeposition window, Figure 2-7 – INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual
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IQS-233 Operating Manual
2.3.3 IQS-233 Codeposition Window
The IQS-233 Codeposition window displays readouts for Film, Rate, Deviation,
Thickness and Power simultaneously for each active output. This window also
provides Process, Layer, Phase, Run, and Time for each active output as well as
customizable process parameters, graphical information, and access to File, Edit,
View, and Help menus. See
.
NOTE: The Rate, Deviation, and Thickness readings displayed represent an
average of the sensors assigned to each film.
Figure 2-7 IQS-233 Codeposition window
NOTE: To zoom in the graph pane, click in the graph pane on the IQS-233
Codeposition window and drag to draw a box over the data needing to be
enlarged. To further zoom in, or to zoom out, rotate the wheel button up or
down, respectively, with the pointer in the graph pane.
File, see
Edit, see
View, see
Help, see