1 process, Section 2.3.3.5.1 – INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual

Page 38

Advertising
background image

2 - 18

IP

N 07

4-

58

5-

P1

A

IQS-233 Operating Manual

2.3.3.5.1 Process

Click Edit >> Process to display the Process window. The Process window
provides the commands needed to develop a thin film deposition process
consisting of one or more Layers. See

Figure 2-16

.

Figure 2-16 Process window

Process name and edit commands, see

section 2.3.3.5.2

Layer tab, see

section 2.3.3.5.4 on page 2-23

Rate Ramps tab, see

section 2.3.3.5.5 on page 2-26

Advertising