INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 121)

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IQS-233 Operating Manual
4.5.2 Loop Tuning Procedure
NOTE: Control loop tuning is a trial and error process and there is no "best"
procedure to accomplish this task. It may take several adjustments to
achieve the desired tune.
1 Set System Parameters
1a In the System Setup window (Edit >> System), click the Card tab and
clear the Enable Simulate check box (if selected).
1b In the System Setup window, click the Display tab. Set Period to 0.25 to
see the noise of the system.
2 Create a One-Layer Test Process
2a In the Materials window (Edit >> Materials), enter the Z-Ratio and
Density of the material being deposited.
2b In the Layer tab of the Process window (Edit >> Process), set the
desired Setpoint (rate) and a non-zero Final Thickness (Final Thickness
setting must be large enough so it will not be reached during this
procedure).
3 Activate Data Logging
3a In the DataLog window (File >> Log Data) select the Data Log path and
attributes.
3b Click Logging Off (changes to Logging On) to activate data logging.
NOTE: Data Logging does not collect data until Start is clicked.
4 Test the System Setup
4a In the Process window, select Manual Start for Start Mode and click OK.
4b In the IQS-233 Codeposition window, click Auto -> Man (changes to
Man -> Auto) and click Start.
4c In the Manual Power box, slowly increase power to 10% and verify that
the power supply output is 10% of Full Scale. If the readings do not agree,
verify that the Full Scale Out voltage in the Outputs tab of the System
Setup window (Edit >> System) agrees with the power supply input
specifications.
4d Continue to increase power until the desired rate is achieved.
4e Log the data for a few minutes.
4f Slowly decrease power to 0%, and then click Stop.