INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual

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IQS-233 Operating Manual

Max Power . . . . . . . . . . . . . The relay will activate when the Output Power is

equal to the Max Power value and deactivate when
the Output Power is below the Max Power value.

Time Setpoint . . . . . . . . . . The relay will activate when the Time End Point

value is reached.

Thickness Setpoint . . . . . . The relay will activate when the Thickness End Point

value is reached.

Final Thickness . . . . . . . . . The relay will activate when the Final Thickness

value is reached.

All Crystals Good . . . . . . . The relay will activate when all activated sensors

have valid frequency readings.

All Crystals Fail . . . . . . . . . The relay will activate when none of the activated

sensors has a valid frequency reading.

Test pane

The PLC relays can be tested without starting a Process. Select a relay event in
the Test box that matches the relay event assigned to the relay to be tested. Use
the Set, Clear, and Clear All commands to test the relay.

Set . . . . . . . . . . . . . . . . . . . . Activates the relay(s) corresponding to the selected

event.

Clear . . . . . . . . . . . . . . . . . . Deactivates the relay(s) corresponding to the

selected event.

Clear All . . . . . . . . . . . . . . . Deactivates all activated relays.

Input Events pane

Selecting an event from an Input Events box will initiate this event when the
corresponding PLC input is activated.

Not Assigned . . . . . . . . . . . Activating the corresponding PLC input has no effect

on events.

Start Process . . . . . . . . . . . Starts the current Process.

Abort Process . . . . . . . . . . Aborts the current Process.

Start Layer . . . . . . . . . . . . . Starts the current Layer.

Stop Layer. . . . . . . . . . . . . . Stop the current Layer.

Next Layer. . . . . . . . . . . . . . Skips the current Layer and starts the next Layer.

Force Final Thick . . . . . . . . Same effect as reaching the Final Thickness value.

Zero Thickness. . . . . . . . . . Zeroes the Thickness reading.

Zero Time (NA) . . . . . . . . . . This event is not available.

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