INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 43)

2 - 23
IP
N 07
4-
58
5-
P1
A
IQS-233 Operating Manual
2.3.3.5.4 Layer Tab
The Layer tab (see Figure 2-22 ), used to configure a Layer, consists of the
following parameters:
Figure 2-22 Process window - Layer tab
Film . . . . . . . . . . . . . . . . . . . Select the Film name to be used for the selected
Layer. A Film consists of the parameters configured
in the Film Edit window (see
Figure 2-24 on page
2-28 ).
Output . . . . . . . . . . . . . . . . . Select the name of the source Output to be used for
the selected Layer. The relationship between the
Output name and the physical output connection on
the IQM-233 or SQM-242 card is configured in the
Outputs tab of the System Setup window (see
Figure
2-36 on page 2-44 ). Refer to the IQM-233 or
SQM-242 operating manual for information about
the physical source output connection.
Input. . . . . . . . . . . . . . . . . . . Sensor(s), Timed Power
The Input selection determines the control method
used during the deposition phase.