INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual
Page 122
4 - 8
IP
N 07
4-
58
5-
P1
A
IQS-233 Operating Manual
4g
Plot the data in a spreadsheet program. If the system has significant short
term noise at a fixed power, the control loop will be difficult to adjust,
especially at low rates. The source of the noise should be eliminated
before attempting to set the PID values (refer to the Troubleshooting
section in the IQM-233 or SQM-242 operating manual).
5
Determine Max Power
5a
In the Process window, verify Manual Start is selected for Start Mode.
5b
Click Start.
5c
In the Manual Power box, slowly increase power until the desired rate is
achieved.
5d
Record the Power (%) reading at the desired rate as PWR
DR
.
5e
In the Max Power box, select a value 20% higher than PWR
DR
.
5f
If finished, slowly decrease power to 0%, and then press Stop. Otherwise,
continue to step 7.
6
Determine Open Loop Response Time (refer to
)
6a
Calculate 1/3 of the desired rate (RATE
1/3
), and 2/3 of the desired rate
(RATE
2/3
).
6b
Slowly adjust the power until the rate matches RATE
1/3
and is steady.
6c
Quickly adjust Power (%) to PWR
DR
and measure the time for the rate to
equal RATE
2/3
.
6d
Twice the measured time is the step response time, TIME
SR
.
6e
If finished, slowly decrease power to 0%, and then press Stop. Otherwise,
continue to step 8.
NOTE: TIME
SR
is typically 0.2 to 1 second for e-beam evaporation and at least
5 seconds for thermal evaporation.
NOTE: It is recommended to repeat this step several times to get an average
response time.