INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 127)

A - 1
IP
N 07
4-
58
5-
P1
A
IQS-233 Operating Manual
Appendix A
Material Table
A.1 Introduction
Table A-1 represents the density and Z-Ratio for various materials. The list is
alphabetical by chemical formula.
An * is used to indicate that a Z-Ratio has not been established for a certain
material. A value of 1.000 is defaulted in these situations. To determine the Z-Ratio
where the Z-Ratio for a material has not been established, refer to
section 4.4,
Determining Z-Ratio, on page 4-3 .
WARNING
Some of these materials are toxic. Consult their material
safety data sheet and safety instructions before use.
Table A-1 Material table
Formula Density Z-Ratio Material Name
Ag 10.500 0.529 silver
AgBr 6.470 1.180 silver bromide
AgCl 5.560 1.320 silver chloride
Al 2.700 1.080 aluminum
Al
2
O
3
3.970 0.336 aluminum oxide
Al
4
C
3
2.360 *1.000 aluminum carbide
AIF
3
3.070 *1.000 aluminum fluoride
AIN 3.260 *1.000 aluminum nitride
AlSb 4.360 0.743 aluminum antimonide
As 5.730 0.966 arsenic
As
2
Se
3
4.750 *1.000 arsenic selenide
Au 19.300 0.381 gold
B 2.370 0.389 boron
B
2
0
3
1.820 *1.000 boron oxide
B
4
C 2.370 *1.000 boron carbide
BN 1.860 *1.000 boron nitride