INFICON Cygnus Thin Film Deposition Controller User Manual
Page 116
5 - 12
IP
N 07
4-
37
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Cygnus Operating Manual
9
(0x09)
Crystal Stability
Int
0
9
10
(0x0a)
Maximum
Power
%
float
0.01
99.99
11
(0x0b)
Minimum
Power
%
float
0.00
99.98
12
(0x0c)
Soak Power 1
%
float
0.00
99.99
13
(0x0d)
Rise Time 1
sec
See Note 4
Int
0
5999
(99:59)
14
(0x0e)
Soak Time 1
sec
See Note 4
Int
0
5999
(99:59)
15
(0x0f)
Soak Power 2
%
float
0.00
99.99
16
(0x10)
Rise Time 2
sec
See Note 4
Int
0
5999
(99:59)
17
(0x11)
Soak Time 2
sec
See Note 4
Int
0
5999
(99:59)
18
(0x12)
Idle Power
%
float
0.00
99.99
19
(0x13)
Idle Ramp
Time
sec
See Note 4
Int
0
5999
(99:59)
20
(0x14)
Rate
A/sec
float
0.000
999.9
21
(0x15)
Final
Thickness
kA
float
0.000
999.9
22
(0x16)
On Final
Thickness
0 = NonDep Control
1 = Idle Ramp
2 = Continue
Int
0
2
23
(0x17)
Crystal Fail
Option
0 = Time Power
1 = Idle Ramp
2 = Stop
Int
0
2
Table 5-4 Channel Parameters (continued)
Channel
Command
ID
Name
Units / Allowed
Values / Notes
Data
Type
Low Limit
High Limit