INFICON Cygnus Thin Film Deposition Controller - Manual (Page 172)

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Cygnus Operating Manual
RATEWATCHER HOLD
The RateWatcher feature is active. The sensor shutter is closed. The previous
sample period’s Average Rate is being integrated for thickness. The previous
sample period’s Average Power is being held constant.
RATEWATCHER SAMPLE
The RateWatcher feature is active. The sensor shutter is open. The source
rate is being measured and it’s power controlled.
STOP - CRUCIBLE ERR
The Channel is in the STOP state because the Crucible Input was not present
after being in the Crucible Switch state for more than 1 minute.
STOP - FRONT PANEL
Indicates the front panel STOP key has been pressed.
STOP - Hand Held
STOP executed from the Hand-Held Controller.
STOP - LOGIC n
STOP executed from Logic Statement n.
STOP - MAX POWER
Indicates the Channel is stopped because Max Power has been exceeded for
over 5 seconds.
STOP - POWER LOSS
Indicates the instrument is in the STOP state due to a prior power loss.
STOP -REMOTE
A remote communications command has placed the Channel into the STOP
state.
STOP - SWITCHER
Indicates the Channel is in the STOP state due to a sensor switcher failure.
STOP - XTAL FAIL
Indicates the Channel is in the STOP state due to a crystal fail while in pre- or
post-deposit, or while in deposit.
SWITCH IN PROGRESS
The manual state can not be exited while a crystal switch is in progress.
TEST
Indicates the instrument is in TEST mode as determined in the General
Parameters set-up.
TIME / DATE SET OK
The Time and / or Date change has been accepted.