INFICON Cygnus Thin Film Deposition Controller - Manual (Page 80)

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Cygnus Operating Manual
3.3 Channel Hardware Parameters
Channel Hardware parameters define the digital-to-analog (DAC) functions, sensor
type, as well as the shutter and crucible outputs for the specified Channel.
Channel Hardware definition is done by pressing the F1 function key on the
Channel Parameters display. Selecting F1 brings up the Channel Hardware
parameters display as shown in
Figure 3-3 .
Figure 3-3 Channel Hardware Parameters Display
Channel Hardware Display Function Keys
F1 PROCESS PARMS
To return to the Channel Parameters display, select F1.
F6 CHANNEL
To return to the Channel display, select F6.
3.3.1 Channel Hardware Parameters Definition
NOTE: All Hardware parameters can be changed only when a channel is in the
STOP or READY state and is not crystal switching on the channel.
SOURCE VOLTAGE RANGE . . . . . 0, 1, 2, 3, 4, 5 (default = 3)
This parameter selects the control voltage range for the Channel being edited.
Permissible values are 0, 1, 2, 3, 4 and 5 for maximum output voltages of 10,
5, 2.5, -10, -5, and -2.5 Volts respectively. The default value is 3, for a control
voltage output of 0 to -10 Volts.
NOTE: This parameter is not available if DAC Option 3 (Rate & Thickness) has
been selected under General Parameters, DAC Output Option.