INFICON Cygnus Thin Film Deposition Controller - Manual (Page 54)

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Cygnus Operating Manual
SENSOR MAINTENANCE Display Description (refer to Figure 2-11 )
Sensor Type
Indicates the Sensor Type as defined on the Channel Hardware display (refer
to
Figure 2-10 ).
XTAL Readings
The values of percent life and activity for the channel sensor crystal
Crystal Status
Depending upon the type of sensor used, this field may be empty (Single), may
identify the current crystal position in addition to the quantity of good crystals
(CrystalTwo); may identify the current crystal position and the position
number(s) of the failed crystal (CrystalSix, Crystal12) or the quantity of good
crystals (Rotary).
Q Count (Crystal Quality value field)
This field displays the value currently accumulated in the Crystal Quality
counter when active. DLY indicates the Crystal Quality counter is not active.
The Crystal Quality counter will become active five seconds after entering
DEPOSIT and if the Crystal Quality parameter value is non-zero.
S Count (Crystal Stability value field)
This field displays the value currently accumulated in the Crystal Stability
counter.
Z-Ratio
Type Material or Auto-Z, value in use.
Frequency
Crystal Fund — normal video = good crystal, inverse video = bad crystal
Anharmonic
Crystal Anharmonic — normal video = good crystal, inverse video = unable to
Auto-Z.
Rate, Power, and Thickness display area
The lower portion of this display shows the Rate, %Power, and Thickness for
the channel.