INFICON Cygnus Thin Film Deposition Controller - Manual (Page 45)

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Cygnus Operating Manual
2.3.1.2 General MAINTENANCE Display
These displays provide a simple method for system maintenance and diagnostics.
To access the MAINTENANCE display, press the GENERAL MAINTENANCE
function key (F2) on the ALL CHANNELS display.
Figure 2-6 General MAINTENANCE Display
General MAINTENANCE Display Description
CHAN #
These numbers correspond to the measurement channel numbers on the
Cygnus rear panel. The cursor keys are used to position the box cursor over
the desired channel number. When either the Crystal Switch, Rotate Crystal
Head, Test XIU, or Clear Quality / Stability function key is pressed, the function
will be performed on the channel indicated by the box cursor. It is not allowed
to cursor to channel numbers that do not have the corresponding measurement
card installed. If a crystal fail has occurred for a particular channel this condition
is indicated by displaying the channel number in reverse video.
SENS TYPE
This field indicates the Sensor Type chosen for each channel number. A “1”
indicates a single crystal head, a “2” indicates a CrystalTwo head, a “6”
indicates a CrystalSix sensor head, a “7” indicates a Rotary sensor and a “12”
indicates a Crystal12.
POSITIONS
This field is subdivided into two categories; current position (CUR), and
FAILED. Information is displayed in these fields if the sensor has more than one
position. For a single sensor type, the CUR and FAILED fields have no
meaning. For a multi-position sensor type, the CUR field indicates the current
position of the sensor head. The FAILED field indicates the sensor head
positions containing failed crystals.