INFICON Cygnus Thin Film Deposition Controller User Manual
Page 118
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5 - 14
IP
N 07
4-
37
9-
P1
K
Cygnus Operating Manual
34
(0x22)
Sensor Type
1 = Single
2 = CrystalTwo
6 = CrystalSix
7 = Rotary
12 = Crystal12
Int
1
12
35
(0x23)
Sensor Switch
Output
0, 1-38
Int
0
38
36
(0x24)
Secondary
Tooling
%
float
1.0
999.9
37
(0x25)
Number of
Crucibles
1,4,8,16,32,64
Int
1
64
38
(0x26)
Crucible
1-64
Int
1
64
39
(0x27)
Crucible
Output
0, 1-37
See Note 1
See Note 3
Int
0
37
40
(0x28)
Crucible
Output Type
0 = NO, 1 = NC
Int
0
1
41
(0x29)
Turret
Feedback
1 = Yes, 0 = No
Int
0
1
42
(0x2a)
Turret Input
0, 1-28
See Note 2
Int
0
28
43
(0x2b)
Turret Delay
sec
Int
1
60
44
(0x2c)
RateWatch
Time
sec
See Note 4
Int
60
5999
(99:59)
45
(0x2d)
RateWatch
Accuracy
%
Int
0
99
46
(0x2e)
Averaging
Time
minutes
Int
0
30
Table 5-4 Channel Parameters (continued)
Channel
Command
ID
Name
Units / Allowed
Values / Notes
Data
Type
Low Limit
High Limit
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