Head. go to – INFICON Cygnus Thin Film Deposition Controller User Manual
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Cygnus Operating Manual
11
Connect the six-inch BNC cable to the Feed-Through and disconnect it from the
Crystal Interface Unit (or Oscillator)
12
Verify electrical continuity from the center pin of the Microdot connector on the
Feed-Through to the un-terminated end of the six-inch BNC cable.
13
Verify electrical isolation from the center pin to electrical ground (Feed-Through
body).
If the Feed-Through/six-inch BNC cable system is found to be defective, look for
defective contacts at the Feed-Through to BNC cable connection. Repair or
replace the Feed-Through as necessary, re-attach the BNC cable to the XIU and
In-Vacuum cable to the Crystal head and repeat this procedure starting at step 2.
8.4.1.3 Sensor Head Or Monitor Crystal
Diagnostic Procedure
1
Remove the Crystal Cover from the Sensor Head.
2
. Connect the Crystal Sensor Emulator to the
Sensor Head at Point C.
If the XTAL Fail message disappears after approximately 5 sec. then the
Sensor Head is operating properly. Re-insert the Crystal Cover into the
Sensor Head and go to
.
If the XTAL Fail message remains, continue at step 3.
3
Disconnect the In-Vacuum cable from the Sensor Head and the Feed-Through.
Remove the Crystal Sensor Emulator from the Sensor Head.
4
Using an Ohm meter, verify the electrical connections on the Sensor Head.
Verify there is electrical continuity from the center pin contact on the
Microdot connector on the Sensor Head to the finger spring contact in the
Sensor Head.
There must be electrical isolation between the center pin of the Microdot
connector and the Sensor Head body.
If the Sensor Head is found to be defective, contact INFICON’s Service Department
to have the Sensor Head repaired. Refer to
.