INFICON Cygnus Thin Film Deposition Controller - Manual (Page 52)

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Cygnus Operating Manual
2.3.1.3.1 Channel Parameters Display
The Channel Parameters Display contains CHANNEL specific material and
process related parameters. This display is accessed by selecting the CHANNEL
PARMS function key (F1) from the CHANNEL display. See
Chapter 3 for a detailed
description for programming of these parameters.
Figure 2-9 Channel Parameters Display
PROCESS Display Function Keys
F1 HARDWARE PARMS
To access the Channel HARDWARE parameters (see Figure 2-10 ), press
function key F1.
F6 CHANNEL
To return to the CHANNEL display, press function key F6.