INFICON Cygnus Thin Film Deposition Controller - Manual (Page 223)

A - 9
IP
N 07
4-
37
9-
P1
K
Cygnus Operating Manual
ZrN 7.090 *1.000 Zirconium Nitride
ZrO
2
5.600 *1.000 Zirconium Oxide
10.000 *1.000 USER
Table A-1 Material Table (continued)
Formula Density Z-Ratio Material Name