INFICON Cygnus Thin Film Deposition Controller - Manual (Page 62)

2 - 26
IP
N 07
4-
37
9-
P1
K
Cygnus Operating Manual
2.7.3 Source/Crucible Selection
Cygnus can control a source with up to 64 crucibles, through up to six binary
encoded relays. This is configured by setting the Number Of Crucibles, Crucible
Outputs, Turret Feedback, Turret Input, and Turret Delay parameters on the
Channel Hardware display.
To define which crucible to use for the channel, set the “crucible” parameter on the
CHANNEL PROCESS display. If the current crucible position is different from the
one requested upon STARTing, the system’s turret controller would move into
position. This will be signified on the Channel display by the state indicator
CRUCIBLE SWITCH. Sequencing will continue on to RISE 1 after either the turret
delay time expires or an input indicates the turret is in position, depending on which
option is chosen. The specific method used is determined by the parameter Turret
Feedback on the Channel Hardware display.
NOTE: If the source has been idling at a nonzero power when the START is
initiated, the power will be dropped to zero before the crucible is changed.
2.7.3.1 Example: Programming Turret Source Crucible Selection
Interfacing a turret source controller to the Cygnus requires both hardware
connections to the turret controller and properly defining certain instrument
parameters.
Proceed to the Channel Hardware display for the source that is going to be defined
as the turret source.
1 Designate the Number of Crucibles; for example, 4.
2 Select the Crucible Output. This defines the number of the first relay that
encodes the crucible number selected by the active channel. Relays are
defined sequentially with the first relay containing the least significant bit (LSB).
The greater the number of crucibles selected, the greater the number of relays
required. The number required is based on binary encoding (actual coding is
binary -1, with 00 representing position 1 and 11 representing position 4). Any
unused sequence of relays may be used if it is long enough to provide sufficient
selections.
3 Select the Crucible Output Type as normally open (NO), or normally closed
(NC).
Example:
Number of crucibles = 4
Crucible output = 6
Crucible output type = NO
For this example, wiring to the controller is based on Table 2-2 . Only relays 6
and 7 are needed to encode the four possible positions