5 source / recorder outputs – INFICON Cygnus Thin Film Deposition Controller User Manual

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Cygnus Operating Manual

1.4.5 Source / Recorder Outputs

Quantity . . . . . . . . . . . . . . . . . . . . . . 6 standard, an additional 6 are optional with

2nd DAC board.

Type . . . . . . . . . . . . . . . . . . . . . . . . . 6 standard with BNC Connectors for Source

control. 6 optional with 15 pin miniature
D-sub providing analog outputs for Rate and
Thickness.

Source control voltage range

(BNC connectors) . . . . . . . . . . . . 0 to 10V, 0 to 5V, 0 to 2.5V,

0 to -10V, 0 to -5V, 0 to -2.5V.

Recorder Voltage Range . . . . . . . . . 0 to 10V

Current rating . . . . . . . . . . . . . . . . . . 20 mA per channel

Resolution . . . . . . . . . . . . . . . . . . . . 15 bits over full range (10 V)

Update Rate . . . . . . . . . . . . . . . . . . . 10 Hz, maximum, (dependent on source

characteristics).

Accuracy. . . . . . . . . . . . . . . . . . . . . . ± 3% full scale

Zero Adjust . . . . . . . . . . . . . . . . . . . . Individual potentiometer

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