INFICON Cygnus Thin Film Deposition Controller - Manual (Page 187)

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Cygnus Operating Manual
Figure 8-1 Standard Crystal Sensor (Exploded)
8.3.2 Shuttered and Dual Sensors
There is no difference in the crystal replacement procedure between shuttered and
non-shuttered Standard and Compact sensors, since the shutter pivots away from
the crystal opening when the shutter is in the relaxed state.
STANDARD CRYSTAL HOLDER
IPN 750-172-G1
CRYSTAL
IPN 008-010-G10
FULLY COATED FACE (GOLD)
CRYSTAL RETAINER
IPN 007-023
FINGER SPRING
CONTACT
STANDARD CRYSTAL SENSOR BODY
IPN 750-207-G1
IPN 750-171-P1
IN-VACUUM
CABLE TO XIU
WATER TUBES