INFICON Cygnus Thin Film Deposition Controller - Manual (Page 165)

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Cygnus Operating Manual
Proceed as follows to calculate the amount of cross talk at Sensor Channel (N+1)
due to material from Source Channel N:
1 Enter the desired Rate parameter's value for Channel N. Enter the appropriate
Maximum Power value into Channel N.
2 Enter a Rate of 0.1 into the rate parameter for Channel (N+1). Enter zero as the
value of the Maximum Power parameter for Channel (N+1).
3 Enter the density and Z-Ratio for Channel N into the Density and Z-Ratio
parameters for both Channels. Enter a value of Auto-Z parameter = No for both
Channel N and Channel (N+1).
4 Enter a value of zero into the Cross Talk Percent parameter for Channel N. The
value in the Cross Talk Percent parameter for Channel (N+1) should also be
zero.
5 Start the co-deposition, allowing Channels N and (N+1) to sequence through
the pre-deposition phases. The power for source Channel N should be ramped
to the appropriate levels while the power to source Channel (N+1) should be
held at 0 %.
6 After Channels N and (N+1) enter the DEPOSIT state and the rate from source
Channel N is stable at the desired deposition rate, zero the thickness
accumulation for both Channels. This may be done from the All Channel
display by placing the cursor on Channel N and pressing the panel key Zero
Thickness (F2), moving cursor to Channel (N+1) and again pressing the panel
key Zero Thickness (F2) in rapid succession or by using the Zero Thickness
commands via the remote communications or internal logic.
7 Allow the thickness to accumulate for Channels N and (N+1) (on both sensors)
for at least 1 minute. Longer thickness accumulations may be necessary for low
rates and/or to reduce the error introduced by not being able to zero the
thickness for both Channels concurrently. Larger thickness accumulations will
result in a more accurate calculated value.
8 Calculate the Cross Sensitivity value for Channel (N+1) using the following
equation: CTP(N+1) = (Thickness at Sensor Channel (N+1)/Thickness at
Sensor Channel N)X100%
9 Enter the calculated value, CTP(N+1), as the Cross Talk Percent parameter's
value for Channel (N+1). Zero the thickness accumulation for both Channels
concurrently and monitor the thickness accumulation for both Channels.
10 The thickness for Channel (N+1) should remain at 0.000 kÅ. Small adjustments
of the value for the Cross Talk Percent may be necessary in order to obtain a
zero thickness accumulation for Channel (N+1).
11 Stop the deposition and place the instrument into the READY state by pressing
Reset. Enter the desired deposition rate into the Rate parameter for Channel
(N+1). Enter the appropriate Maximum Power value into Channel (N+1). Also