INFICON Cygnus Thin Film Deposition Controller User Manual
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Cygnus Operating Manual
The tooling factor is calculated using the equation:
[1]
where TF
i
= Initial Tooling Factor, T
m
= Actual Thickness at the Substrate, and
T
x
= Thickness on the Crystal.
If the TOOLING parameter is changed, the new TOOLING value is used for
subsequent calculation of the rate and thickness. Also, the thickness
accumulated thus far will be re-scaled based on the change to the TOOLING.
SECONDARY TOOLING . . . . . . . . . 1.0 to 999.9% (default = 100.0)
This is a second tooling factor for use with the CrystalTwo Switch. It allows a
second tooling factor for the second crystal of the CrystalTwo Switch to
accommodate the thickness difference between the two different crystal
positions. The function is the same as the Tooling factor and is calculated in the
same manner.
CONTROL LOOP . . . . . . . . . . . . . . 0, 1, 2 (default = 2)
This parameter establishes the control loop algorithms pertaining to either a
slow responding source or a fast responding source. Permissible values are 0,
1, or 2. Select a 0 to choose the non-PID control loop, good for fast- and
medium-speed responding systems with high noise levels (e.g., an electron
beam gun with or without a liner, having a large sweep amplitude of low
frequency, 10 Hz or less). Select a 1 for the PI control loop, good for fast,
medium, or slow systems with medium noise levels (e.g., an electron beam gun
with medium sweep amplitude frequency, 20 to 100 Hz; also, sputtering and
resistive sources). Select a 2 for the PID Control Loop, good for medium or slow
systems with low noise levels (e.g., an electron beam gun with sweep off or at
a high frequency, 100+ Hz; also, sputtering and resistive sources).
PROCESS GAIN . . . . . . . . . . . . . . . 0.01 to 999.99 Å/sec/% pwr (default = 10.00)
This parameter determines the change in % Power for a given rate deviation
(dRate/dPower). The larger the process gain value, the smaller the change in
power for a given rate error.
PRIMARY TIME CONSTANT. . . . . . 0.010 to 9999.99 sec (default = 1.00)
This is the evaporation source’s time constant. This value is defined as the time
difference between the actual start of a change in rate and the time at which
63% of the rate step is achieved. This value may be measured according to the
above criterion or it may be determined empirically. This parameter is disabled
if the CONTROL LOOP option parameter is set to 0.
SYSTEM DEAD TIME . . . . . . . . . . . 0.010 to 9999.99 sec (default = 1.00)
This value is defined as the time difference between a change in % power and
the start of an actual change in rate. This parameter is disabled if the
CONTROL LOOP option parameter is set to 0.
TOOLING
TF
i
T
m
T
x
=