INFICON Cygnus Thin Film Deposition Controller - Manual (Page 74)

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Cygnus Operating Manual
AVERAGING TIME . . . . . . . . . . . . . 0 to 30 min (default = 0)
This parameter value determines the amount of time used in calculating the
average rate and average power for use in Time Power.
The Averaging Time parameter is the time interval used to calculate both the
average rate and average power applied, if a crystal fails, for Time-Power and
Non-Deposit Hold states. When the Averaging TIme parameter value is 0, then
a 2.5 second average, ignoring the most recent 0.5 second, is the averaging
interval.
A channel warning ABBREVIATED AVERAGE is generated if the averaging
interval has not been reached, but there was at least a "complete whole minute"
of data to average.
A channel error NO TIME POWER AVG is generated if a crystal fail occurred
within the first minute of control with Averaging TIme set >0. This error also
occurs if there is a crystal fail during the first 2.5 seconds of control with the
Averaging TIme =0. (There are also SC and RC commands to get and set the
average rate and average power values.)
Idle Ramp State
The next two parameters define an idle ramp provided to maintain the control
voltage power level after the Deposit or NonDeposit Control state. Control voltage
is ramped from the power level at the end of the Deposit (or NonDeposit Control)
state to the Idle Power level. The control voltage is maintained at the Idle Power
level until the instrument enters the STOP state or until the Channel is started
again. If the Idle Power is non-zero, the started channel will skip Rise 1 and
Soak 1, and will begin at Rise 2.
IDLE POWER . . . . . . . . . . . . . . . . . 0.0 to 99.99% (default = 0.00%)
This is one of two parameters used to affect an Idle Power Ramp. This value is
the power level at which the source is maintained after the DEPOSIT (or
NonDeposit Control) state. Idle Power is usually the same as Soak Power 1.
IDLE RAMP TIME . . . . . . . . . . . . . . 00:00 to 99:59 min:sec (default = 00:00)
This is the time interval over which the source power is ramped linearly from
the power level at the end of Deposit (or NonDeposit Control) to Idle Power.