INFICON Cygnus Thin Film Deposition Controller - Manual (Page 143)

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Cygnus Operating Manual
Chapter 6
Installation and Interfaces
6.1 Location Guidelines
Before you permanently install this controller, we recommend that you read this
entire section on Installation and Interfaces and follow its recommendations as
closely as possible. INFICON has taken numerous steps to ensure its equipment
will operate in a variety of harsh situations. Failure to adhere to these simple
practices may adversely affect the performance and longevity of this controller, or
controllers made by any manufacturer.
6.1.1 Sensor Types
The choice of sensor type is dictated by the Process, the deposition material and
the physical characteristics of the process chamber. General guidelines for each
sensor type produced by INFICON are outlined in the Sensor Selection table,
Table 6-1 . For specific recommendations, consult your INFICON representative.