INFICON Cygnus Thin Film Deposition Controller - Manual (Page 167)

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Cygnus Operating Manual
Chapter 8
Troubleshooting, Status and Error Messages
8.1 Status and Error Messages
ABBREVIATED AVERAGE
During a rate control state, a crystal failure occurred after more than 1 minute
but before the number of minutes specified in the "Averaging Time" channel
parameter. Indicates the time over which the Rate and Power are averaged is
less than the requested time interval specified by the "Averaging Time"
channel parameter.
ALREADY RUNNING
This message appears if a START command is given to the Channel and the
Channel is already executing its process.
ALREADY SWITCHING
An attempt is being made to switch a crystal or switch a crucible while a crystal
switch or crucible switch is already in progress.
CANNOT TOGGLE INPUT
Output types can be toggled between Normally Open and Normally Closed.
An Input does not have a type function and cannot be toggled.
CANT DO: XTAL SWITCH
An XIU test can not be done while a crystal switch is in progress.
CAROUSEL CHANGE-OUT
The crystal carousel assembly has been removed from a Crystal12 sensor.
CHANNEL TOO BIG
A Channel value greater than 6 can not be entered into a Thickness Equation.
CRUC SWITCH ERROR
This error occurs when a Channel has been in the Crucible Switch state for
greater than 1 minute without receiving a valid Turret Feedback input signal.
CRUC SWITCHING
Indicates a crucible switch is in progress.
DATA LOG FAILURE
The instrument is attempting to output the datalog string faster than the
external device (e.g., computer, or floppy disk) can accept the data. This
means the datalog information for this Channel is lost.
DISK ERROR
The instrument is unable to save or retrieve information on the floppy disk.