INFICON Cygnus Thin Film Deposition Controller User Manual
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Cygnus Operating Manual
Q (Crystal Quality value field)
This field displays the value currently accumulated in the Crystal Quality
counter when active. The Crystal Quality counter will become active five
seconds after entering DEPOSIT and if the Crystal Quality parameter is
non-zero. The function of the Crystal Quality counter is described in
S (Crystal Stability value field)
This field displays the value currently accumulated in the Crystal Stability
counter. The function of the Crystal Stability counter is described in
XTAL
This field is subdivided into two categories. The first category, LIFE displays the
crystal life. The second category is a measurement of the crystal activity, ACT.
For a detailed explanation of LIFE and ACT, see
RATE
This field is subdivided into three categories. These fields are useful in
identifying if a sensor’s rate measurements are becoming erratic. 0.000 will be
displayed in these fields for channels not in use. All values are refreshed at the
display’s one second update rate.
The first category is DISPLAY. The value displayed here is the channel’s
average rate. This average is calculated based on a 1 second average.
The second field labeled FILTER is based on the average of the RAW rate
(100 msec) measurements over the Rate Filter Time selected in the Channel
Parms screen for that particular channel.
The third field is RAW representing the instantaneous 100 msec frequency
change measurement restated in Angstrom/second units.
General MAINTENANCE Display Function Keys
F1 RS232 TEST
To initiate the RS-232C COMM PORT self test, press function key F1. Upon
completion of the test, the unit will display a message indicating the test was
successful and the COMM PORT is okay; or the test failed and the COMM
PORT is bad.
NOTE: The RS-232C Loop Back connector, IPN 760-406-P1 must be installed
on the Cygnus RS-232C port for the self-test to work properly.
F2 SYSTEM STATUS
To access the SYSTEM STATUS display (refer to
),
press function key F2.