INFICON Cygnus Thin Film Deposition Controller User Manual
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Cygnus Operating Manual
5
(0x05)
Data Logging
Path
0 = Off,
2 = File, Page Format
3 = File, Comma
Delimited
0
3
6
(0x06)
Print Screen
Path
2 = Floppy Disk
1
2
7
(0x07)
Print Screen
Number
0
999
8
(0x08)
RS232 Baud
Rate
2400, 4800, 9600,
19200
2400
19200
9
(0x09)
IEEE-488
Address
(0-30)
0
30
10
(0X0a)
(Not Used)
Int
0
0
11
(0x0b)
Data Log
Crystal History
1 = Yes, 0 = No
0
1
12
(0x0c)
DAC Output
Option
0 = Power / Rate
1 = Power / Thickness
2 = Pwr / Rate / Thick
(4 Channel)
3 = Rate / Thickness
0
3
13
(0x0d)
Thickness
Equation 1
See Note
0
654321
14
(0x0e)
Thickness
Equation 2
See Note
0
654321
15
(x0f)
Thickness
Equation 3
See Note
0
654321
NOTE: This parameter represents which channels are to be summed together. A
digit represents each channel. 0 is no channel selected. 1 is channel one, 2
is channel two and so on. The value 654321 means sum all six channels.
Only the digits 0 to 6 are allowed. Each channel can only be used once in an
equation.
Table 5-5 General Parameters (continued)
QG
Command
ID
Name
Units / Allowed
Values / Notes
Low Limit
High Limit