Appendix a material table, Appendix a – INFICON Cygnus Thin Film Deposition Controller User Manual
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Cygnus Operating Manual
Appendix A
Material Table
CAUTION
Some of these materials are toxic. Please consult the
material safety data sheet and safety instructions before
use.
An * is used to indicate that a Z-Ratio has not been established for a certain
material. A value of 1.000 is defaulted in these situations.
Table A-1 Material Table
Formula
Density
Z-Ratio
Material Name
Ag
10.500
0.529
Silver
AgBr
6.470
1.180
Silver Bromide
AgCl
5.560
1.320
Silver Chloride
Al
2.700
1.080
Aluminum
Al
2
O
3
3.970
0.336
Aluminum Oxide
Al
4
C
3
2.360
*1.000
Aluminum Carbide
AIF
3
3.070
*1.000
Aluminum Fluoride
AIN
3.260
*1.000
Aluminum Nitride
AlSb
4.360
0.743
Aluminum Antimonide
As
5.730
0.966
Arsenic
As
2
Se
3
4.750
*1.000
Arsenic Selenide
Au
19.300
0.381
Gold
B
2.370
0.389
Boron
B
2
0
3
1.820
*1.000
Boron Oxide
B
4
C
2.370
*1.000
Boron Carbide
BN
1.860
*1.000
Boron Nitride
Ba
3.500
2.100
Barium
BaF
2
4.886
0.793
Barium Fluoride
BaN
2
O
6
3.244
1.261
Barium Nitrate
BaO
5.720
*1.000
Barium Oxide
BaTiO
3
5.999
0.464
Barium Titanate (Tetr)
BaTiO
3
6.035
0.412
Barium Titanate (Cubic)