INFICON Cygnus Thin Film Deposition Controller User Manual
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Cygnus Operating Manual
If the noise is crystal frequency resolution limited — the thickness change
over one second provides ten times the thickness change vs. the thickness
change measured over a tenth of a second. A one second averaging
interval will improve rate resolution by 10 times.
If the sensor noise is random, then RMS reduction of rate noise is provided
by the square root of the number of point’s averaged (example a 10 point
average provides a factor of 3.1 noise reduction).
The selection of the appropriate Rate Filter Time value will be dependent on the
characteristics of the source.
CROSS TALK PERCENT . . . . . . . . 0.00 to 99.99% (default = 0.00)
This parameter is used for co-deposition of two sources. The selection of two
co-deposition sources is always a Channel N= (odd value) and Channel (N+1).
This parameter provides a value used in an algorithm that compensates for
cross interference during co-deposition. Mass accumulation onto the sensor for
source Channel N due to evaporant from source Channel (N+1) can be
subtracted from the mass accumulation onto sensor Channel N due to source
Channels N and (N+1). The correction is expressed as a percentage of the rate
at sensor Channel N over the rate at sensor Channel (N+1) due to only source
Channel (N+1). When calculating cross sensitivity, the density and Z-Ratio
parameter values should be the same for each source. See
for a procedure on how to determine Cross Talk Percent values.
The Cross Talk Percent value is calculated according to the equation (while
depositing from source Channel (N+1) only).
[1]
This is the value entered into the Cross Talk Percent parameter for Channel N.
AUTO-Z . . . . . . . . . . . . . . . . . . . . . . YES / NO (default = NO)
This parameter designates the method in which the Z-Ratio value will be
obtained for use in computing thickness with this sensor.
YES indicates that the Auto Z calculation feature of the system is used. If
Auto-Z cannot be enabled on a crystal, the “Unable To Auto Z” message will be
displayed.
NO indicates that the Z-Ratio established in Z-Ratio parameter is used.
The default value is NO and the Z-Ratio value will be used.
Thickness at sensor Channel N
Thickness at sensor Channel (N+1)
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100%
VALUE
=