INFICON Cygnus Thin Film Deposition Controller User Manual
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Cygnus Operating Manual
Chapter 1
Introduction and Specifications
1.1 Introduction
Cygnus is a closed loop process controller designed for use primarily in physical
vapor deposition. The unit monitors and/or controls the rate and thickness of the
deposition of thin films. Deposition rate and thickness are inferred from the
frequency change induced by mass added to a quartz crystal. This technique
positions sensors in the path between or to the side of the source of the vaporized
material and the target substrate. The sensor incorporates an exposed oscillating
quartz crystal whose frequency decreases as material accumulates. The change
in frequency provides information to determine rate and thickness and to
continually control the evaporation power source. With user supplied time,
thickness and power limits and with desired rates and material characteristics, the
unit is capable of automatically controlling the process in a precise and repeatable
manner. User interaction is accomplished via the unit's front panel and consists of
selection or entry of parameters to define the process.
The complete system consists of a main electronics unit, the Cygnus, sensor
heads and a crystal interface unit (XIU) for each attached sensor. These items are
generally bundled at the factory and are also sold separately.
The Cygnus Manual provides user information for installing, programming,
calibrating and operating the main electronics unit.
When reading the Cygnus Manual, please pay particular attention to the NOTES,
CAUTIONS, and WARNINGS found throughout the text. The Notes, Cautions, and
Warnings are defined in
You are invited to comment on the usefulness and accuracy of this manual by filling
out the registration card and returning it.
1.1.1 Related Manuals
Sensors are covered in separate manuals.
074-154 - Bakeable
074-155 - CrystalSix
074-156 - Single/Dual
074-157 - Sputtering
074-398 - Crystal12