INFICON Cygnus Thin Film Deposition Controller - Manual (Page 50)

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Cygnus Operating Manual
10 Channel sensor information
This region of the Channel identifies the sensor type currently defined in the
Channel hardware configuration (see
section 2.3.1.3.1.1 on page 2-17 ). If a
value of 2, 6, 7 or 12 is selected for the sensor type, the current crystal position
as well as the quantity of good crystals remaining is displayed.
11 Scale 0 / 1 / 2
Establishes the vertical scale for the channel graphics display. Permissible
values are 0, 1 and 2. A 0 sets the vertical scale to % Power, 1 sets the vertical
scale to ±10 Å/sec, while a 2 sets the vertical scale to ±20 Å/sec. The default
value is 1.
12 Graphical display of rate deviation or power
13 State of channel
14 Rate of the channel