INFICON Cygnus Thin Film Deposition Controller - Manual (Page 68)

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Cygnus Operating Manual
If two Channels are co-deposited, the first Channel to have a source shutter close
will be data-logged first.
The ability to turn ON/OFF datalogging and where to output the datalog data set is
determined by a programmable parameter located in the General Parameters
display. The CRYSTAL USE HISTORY data is an optional subset of the datalog
string. A second parameter located in the General Parameters display is used to
determine if the CRYSTAL USE HISTORY is to be output. Additionally, the datalog
string format is selectable between a page format and a comma delimited format.
The comma delimited format is actually comma-and-quote delimited intended for
file importation into a spreadsheet program. When a spreadsheet program imports
a file having the comma delimited format data groups that are strictly numbers
become value entries, data groups surrounded by quotes are stored as labels. For
the page format, only those sensors which are used in a particular Material for a
particular Layer will be datalogged. For the comma delimited format, all the data
fields are returned for all the sensors and crystals. If a sensor is not used during
the deposition, the data field will contain a zero.
Outputting the Datalog Data Set to multiple outputs at the same time (for example,
Save to diskette and Output to Remote Comm at the same time) is not allowed.
2.7.9 Auto Soak 2
When Auto Soak 2 is enabled, the Soak 2 power parameter will automatically be
updated at the end of deposit or nondeposit control. The value will be the power at
the end of control. This allows the next Soak 2 on the channel to be done at the last
power used to maintain control.
To enable Auto Soak 2, the parameter Dep After PreDep is set to 2.
NOTE: The Soak 2 power parameter retains the new value even if Auto Soak 2 is
subsequently disabled.