INFICON Cygnus Thin Film Deposition Controller - Manual (Page 134)

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Cygnus Operating Manual
5.4.4.2 Status General Commands
The message format is:
SG<Command ID>|<Command ID><Action Value>
Command ID = <byte>
Action Value = <byte> See Table 5-9 .
Table 5-9 Status General Commands
SG
Command
ID Meaning
Action
Value Response
0 Data at Timer
Value <Byte> =
Requested
Timer Value 108 Bytes. Six sets of channel data at the
requested timer tick:
Sensor Status (Byte)
State (Byte)
Rate (filtered) Float
Thickness (Float)
Power (Float)
Rate Deviation (Float)
If data is not available for the timer tick
requested, then the return will be "No
Data" error. (1 byte)
1
(0x01)
Which channels
running 1 Byte, Each bit represents a channel, a bit
set means channel running (i.e. not in Ready
or Stop). MSB is channel 1. Two LSB unused.
2
(0x02)
Output Status 5 Bytes. Each bit represents an output, bit set
means output active. MSB of first byte is
output 1. Two LSB of last byte unused.
3
(0x03)
Input Status 4 Bytes. Each bit represents an input. bit set
means input active. MSB of first byte is input
1. Four LSB of last byte unused.
4
(0x04)
Logic statement
status 13 Bytes. Each bit represents a logic
statement, bit set means logic statement is
true. MSB of first byte is logic statement 1.
Four LSB of last byte unused.