INFICON Cygnus Thin Film Deposition Controller - Manual (Page 56)

2 - 20
IP
N 07
4-
37
9-
P1
K
Cygnus Operating Manual
2.3.1.3.2.1 Channel SOURCE MAINTENANCE Display
Figure 2-12 Channel SOURCE MAINTENANCE Display
Channel SOURCE MAINTENANCE Display Function Keys
F1 SWITCH CRUCIBLE
To switch the source turret to the crucible position designated by the crucible
parameter, press function key F1. When power is at 0.00% only.
F2 TOGGLE SUBSTRATE SHUTTER
To activate the relay for the substrate shutter, press function key F2. A second
pressing of this key deactivates the substrate shutter relay.
F3 TOGGLE SENSOR SHUTTERS
To activate the sensor shutter relay, press function key F3. Pressing this key a
second time deactivates the sensor shutter relays.
F4 START MANUAL POWER
To enable the hand-held controller to effect power changes to the source output
associated with the channel, press function key F4.
F5 SENSOR MAINTENANCE
To access the channel sensor maintenance display press function key F5.
F6 CHANNEL
To return to the Channel display, press function key F6.