INFICON Cygnus Thin Film Deposition Controller - Manual (Page 58)

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Cygnus Operating Manual
2.5 Defining a Process
The following procedure is used to define a process. (All steps do not necessarily
have to be followed in the given order.)
1 Make sure the instrument is in READY.
Some configuration and process parameters can be changed only while the
channel is in READY. Therefore, before setting parameters, make sure READY
appears as the state on the CHANNEL display. If it does not, press STOP then
RESET.
2 Configure the sensor.
Configuring the sensor involves designating whether the sensor is a single,
CrystalTwo, CrystalSix, Crystal12 or Rotary sensor, and what output relays are
connected to the sensor shutter and crystal switcher, if any. These parameters
are on the Channel HARDWARE display.
3 Configure the sources.
Configuring the sources involves selecting, the output voltage range and
polarity, and selecting the output relay for the substrate shutter. Also, if a source
has more than one crucible, this is set up in the source configuration. The
source parameters are programmed on the HARDWARE display.
2.5.1 Executing a Process
Once a process has been defined, it is ready to execute.
NOTE: Certain parameters cannot be changed while executing a process. The
Cygnus will not allow these parameters to be changed.
 A Process is not being executed when the instrument is in the READY or STOP
state.
 STOP freezes a process, the status information on the display is maintained
and the control voltage output is set to zero.
 START, pressed once, will continue the process from the point at which it was
stopped.
 RESET takes a stopped process back to the beginning of the process.
HINT: It may be desirable to execute a new process in TEST before doing an
actual deposition to check correct shutter operation, sequencing and limits.