INFICON Cygnus Thin Film Deposition Controller User Manual
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Cygnus Operating Manual
DATE:
MM-DD-YYYY
TIME:
XX:XX
CHANNEL #:
#
RUN TIME:
XX:XX
DEPOSITION TIME:
XX:XX
THICKNESS:
###.###
kÅ
AVE. AGG. RATE:
###.###
Å/s
AVE. RATE DEV:
##.###
Å/s
ENDING POWER:
##.##
%
AVE. POWER:
##.##
%
COMPLETION:
POST-DEPOSIT NORMAL
(time-power, ave. value,
crystal fail, remote, keyboard,
max. power, hand-held controller)
Crystal Use History (example)
SENSOR 1
BEG.
END
BEG.
END
BEG. END
XTAL
FREQ.
FREQ.
LIFE
LIFE
ACT. ACT.
STAB. QUAL.
1
5975323
5876991
0%
2%
245
240
30
22
2
5978368
5879012
0%
2%
225
189
1200
99
3
5768733
5677987
3%
5%
176
168
0
0
4
5346278
5129870
48%
51%
150
105
0
0
5
4876789
4567899
78%
81%
101
101
25
1
6
4678843
4500000
98%
100%
100
92
0
0
SENSOR 2
BEG.
END
BEG.
END
BEG. END
XTAL
FREQ.
FREQ.
LIFE
LIFE
ACT. ACT.
STAB. QUAL.
2
5978368
5879012
0%
2%
225
189
1200
99
3
5768733
5677987
3%
5%
176
168
0
0
5
4876789
4567899
78%
81%
101
101
25
1
SENSOR 8
BEG.
END
BEG.
END
BEG. END
XTAL
FREQ.
FREQ.
LIFE
LIFE
ACT. ACT.
STAB. QUAL.
1
5975323
5876991
0%
2%
245
240
30
22