INFICON Cygnus Thin Film Deposition Controller - Manual (Page 81)

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Cygnus Operating Manual
DAC RATE RANGE. . . . . . . . . . . . . 0 - 999 (default = 0)
This parameter determines the function of the Digital-To-Analog (DAC)
recorder output. Values range from 0 to 4. Refer to the General Parameters
display DAC Output Option for information pertaining to the DAC Rate and DAC
Thickness outputs.
0 . . . . . . indicates the function is Channel Rate in the range of 0 to 10 Å/s.
1 . . . . . . is for Channel Rate in the range of 0 to 50 Å/s.
2 . . . . . . is for Channel Rate in the range of 0 to 100 Å/s.
3 . . . . . . is for Channel Rate in the range of 0 to 1000 Å/s.
4 . . . . . . is for Channel Rate in the range of 0 to 1 Å/s.
5 - 999 . . . . . is for Channel Rate in the range of 0 to the value entered.
DAC THICKNESS RANGE . . . . . . . 0 - 99999 (default = 0)
This parameter determines the function of the Digital-To-Analog (DAC)
recorder output. Values range from 0 to 4. Refer to the General Parameters
display DAC Output Option for information pertaining to the DAC Rate and DAC
Thickness outputs.
0 . . . . . . indicates the function is Channel thickness in the range of 0 to 100 Å.
1 . . . . . . is for Channel thickness in the range of 0 to 1000 Å.
2 . . . . . . is for Channel thickness in the range of 0 to 2000 Å.
3 . . . . . . is for Channel thickness in the range of 0 to 3000 Å.
4 . . . . . . is for Channel thickness in the range of 0 to 5000 Å.
5 - 99999 . . . is for channel thickness in the range of 0 to the value entered.
NOTE: The recorder output for the specified DAC Thickness Range is modulo
of the channel’s thickness value and the DAC Thickness Range’s
upper limit value. The recorder output will roll over to zero volts when
the channel’s thickness reaches the DAC Thickness Range upper limit
value, and for every N times the DAC Thickness Range upper limit
value.
SUBSTRATE SHUTTER OUTPUT . . . . . . . . . . 0 to 38 (default = 0)
This parameter designates which of the 38 outputs is to be used as the
Substrate Shutter output. Values range from 0 through 38. 0 indicates that a
Shutter is not used and the values 1 through 38 correspond to the appropriate
relay or open collector type output. If a value other than 0 is entered the output
chosen as the Substrate Shutter output is designated as such in the I/O Map
Display. The Substrate Shutter output is activated upon the Channel entering
the Deposit or Manual states and stays active until the Channel exits the
Deposit and Manual states.
SUBSTRATE SHUTTER OUTPUT TYPE . . . . . 0, 1 (default = 0)
This parameter designates the normal state of the relay contacts for the
Substrate Shutter Output output. Permissible values are 0 and 1. 0 indicates a
Normally Open output, 1 indicates a Normally Closed output.