INFICON Cygnus Thin Film Deposition Controller - Manual (Page 183)

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IP
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Cygnus Operating Manual
8. CrystalSix and Crystal12:
crystal switch problem
(does not advance or not
centered in aperture) a. loss of pneumatic supply,
or pressure is insufficient
for proper operation a. ensure air supply is
regulated at 80-90 PSIG
b. operation has been
impaired as a result of
material accumulation on
cover b. clean material
accumulation as needed,
refer to either the CrystalSix
manual IPN 074-155 or
Crystal12 manual IPN
074-398 for maintenance
c. improper alignment c. realign as per instructions
in either the CrystalSix
manual IPN 074-155 or
Crystal12 manual IPN
074-398
d. 0.0225" diameter orifice
not installed on the supply
side of solenoid valve
assembly. d. install orifice as shown in
either the CrystalSix
manual IPN 074-155 or
Crystal12 manual IPN
074-398
9. Crystal12: Carousel
Change Out and Xtal Fail
messages remain after
installing carousel. a. open circuit a. initiate a Crystal Switch
or Rotate Head function
10. Crystal12: Unit indexes
twelve times and displays
Xtal Switch Error, Xtal Fail,
and Carousel Change Out
message. a. loss of electrical signal a. check for electrical
continuity and isolation
b. resistor #1 is open b. check for electrical
continuity and isolation
c. no carousel installed c. install carousel
d. torsion spring of electrical
connection assembly
broken d. replace electrical
connection assembly —
refer to Crystal12 manual
IPN 074-398
Table 8-2 Troubleshooting Transducers/Sensors (continued)
SYMPTOM CAUSE REMEDY