INFICON Cygnus Thin Film Deposition Controller - Manual (Page 51)

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Cygnus Operating Manual
CHANNEL Display Function Keys
F1 CHANNEL PARMS
To access the PROCESS (see Figure 2-9 ) and HARDWARE (see Figure 2-10 )
related channel parameters, press function key F1.
F2 ZERO THICKNESS
To resets the channel thickness and zero the channel’s contribution to the
thickness sum equations, press function key F2.
F3 MANUAL
To put the channel in manual control, (so that the power level is controlled by
the hand-held controller), press function key F3. When in manual, the F3 panel
reads AUTO, and pressing it will remove the channel from the manual state and
place it into a rate control state. See State Descriptions (see
section 2.6 on
page 2-23 ) for a more complete description of manual operation.
F4 CRYSTAL SWITCH
To initiate a crystal switch, press function key F4.
F5 CHANNEL MAINTENANCE
To move to the Channel Sensor and Source Maintenance displays, press
function key F5.
F6 ALL CHANNELS
To return to the ALL CHANNELS display, press function key F6.