INFICON Cygnus Thin Film Deposition Controller User Manual
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Cygnus Operating Manual
shows Event Codes in HEX notation.
"s" indicates Channel Number: 0 to 6
"n" indicates Channel Number: 1 to 6
Table 5-6 Event Codes
Name
Description
Normal
Negated
External In x
External Input x (x = 1 to 28)
0x41
0xBF
Crucible
SW s
Crucible
Switch s
0x42
0xBE
Rise 1 s
Rise 1 s
0x43
0xBD
Soak 1 s
Soak 1 s
0x44
0xBC
Rise 2 s
Rise 2 s
0x45
0xBB
Soak 2 s
Soak 2 s
0x46
0xBA
Deposit s
Deposit s
0x47
0xB9
NonDep Cntl s
Non Deposit Control s
0x48
0xB8
Time Power s
Time Power s
0x49
0xB7
NonDep Hold s
Non Deposit Hold s
0x4A
0xB6
Idle Ramp s
Idle Ramp s
0x4B
0xB5
Ready s
Ready s
0x4C
0xB4
Stop s
Stop s
0x4D
0xB3
Substr Shtr s
Substrate Shutter s
0x4E
0xB2
Manual s
Manual s
0x4F
0xB1
Thick Limit n
xxx.xxx
Thickness Limit n xxx.xxx kÅ
(see note 1)
0x50
0xB0
Timer HH:MM x xx:xx
Timer Limit HH:MM x xx:xx
(x = 1 to 20, xx:xx is valid time)
(see note 2)
0x51
0xAF
Timer SECS x xxx.x
Timer Limit Sec x xxx.x
(x = 1 to 20, xxx.x is valid time)
(see note 3)
0x52
0xAE
Counter Limit x xxx
Counter x xxx
(x = 1 to 20, xxx = 0 to 999)
0x53
0xAD
Statement x
Logic Statement x (x = 1 to 100)
0x54
0xAC
Comp Cntl
Computer Control
0x55
0xAB
Xtal Fail s
Crystal Fail s
0x56
0xAA